ERG at ALD 2013 (San Diego)!

ERG is in San Diego at ALD 2013! You might have caught Prof. Engstrom’s short workshop presentation on the characterization of ultra-thin ALD films on Sunday, July 28.

On July 30 at 11 am in Session B, you can catch Wenyu Zhang’s presentation on “The Effect of Substrate Composition on Selective Area Atomic Layer Deposition Using Self-Assembled Monolayers as Blocking Layers”.

We have also recently published a paper on “Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering”. This Wenyu’s first first-authored paper! Congrats! You can find the paper here.